Analytical Services

Electronic Speciality Gases | Ultra- High Purity Equipment / TRiMEGA | Air Products Electronic Chemicals (APEC) | MEGASYS | Analytical Services | Environmental Stress Screening

Providing a full line of standard and customised technical services for the semiconductor industry.

Analytical Technical Services Group

  • commissions newly installed UHP backpad and in-fab gas distribution systems.
  • performs APIMS analysis at the backpad and in the fabrication facility.
  • analyses for particle impurities in all bulk gases.

Customer Applications Group

  • Works closely with IC and OEM manufacturers on process effluent characterisation.
  • Actively involved with process optimisation of PFC chamber cleans, focusing on NF3 and C2F6.
  • Works closely with OEM suppliers to determine the relationship of gas purity and process tool performance.