Air Products Electronic Chemicals (APEC)
Electronic Speciality Gases | Ultra- High Purity Equipment / TRiMEGA | Air Products Electronic Chemicals (APEC) | MEGASYS | Analytical Services | Environmental Stress Screening
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Supplying electronic chemicals, equipment and on-site management for fabs.
- CVD / deposition chemistries and delivery systems provided by Schumacher, a unit of Air Products.
- Electronic process chemicals (through an alliance with Honeywell).
- CMP slurries (through an alliance with DuPont).
- Photoresist ancillaries/developer.
- CHEMPURE GCG system for on-site generation of ultra-pure chemicals.
- On-site operations experience through MEGASYS Total Gas and Chemical Management System.
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