Electronic Speciality Gases
Electronic Speciality Gases | Ultra- High Purity Equipment / TRiMEGA | Air Products Electronic Chemicals (APEC) | MEGASYSâ„¢ | Analytical Services | Environmental Stress Screening
From the world’s leading supplier of ultra high-purity products.
Expanding global network of specialty gas manufacturing
locations with worldwide distribution capabilities.
Full product portfolio including silicon precursors, rectants,
etchants, dopants, CVD gases and atmospheric inerts.
Manufacturer of fluorine-based compounds for deposition,
etch and plasma and thermal cleaning applications.
Complemented by Solkatronic Chemicals, a business unit of
Air Products providing dopants and high-purity specialty gases
World’s leading producer and supplier of Nitrogen Trifluoride
(NF3) and other fluorinated products. .
Technical and commercial assistance in the development of
new products for specialised applications.